AMAT 0010-42030 Materials Cooling Plate

1. Part Identification

Part Number: 0010-42030

Manufacturer: Applied Materials (AMAT)

Description: Precision vacuum fitting assembly for semiconductor processing equipment

2. Technical Specifications

• Material: 316L stainless steel
• Operating Pressure: 1e-9 to 1 atm
• Temperature Range: -20°C to 200°C
• Connection Type: ISO-KF 40 flange
• Surface Finish: Ra 0.8 μm maximum

3. Compatibility

Suitable for use with the following AMAT systems:

• Endura® 5500 PVD Platform
• Centura® Etch Systems
• Producer® GT CVD Systems

Compatible with standard vacuum gases including nitrogen, argon, and process gases (when properly cleaned).

4. Handling Instructions

Handle only in cleanroom environment (Class 100 or better) after unpacking.

Use lint-free gloves during installation to prevent contamination.

Inspect O-ring (Viton® standard) for damage before installation; replace if necessary.

5. Replacement Interval

Recommended replacement every 12 months or 500 process cycles, whichever comes first.

Inspect quarterly for signs of wear, corrosion, or vacuum leakage.